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Mocvd of Polycrystalline and Epitaxial Complex Oxides by Liquid Delivery

Published online by Cambridge University Press:  15 February 2011

J. F. Roeder ,
S. M. Bilodeau ,
R. J. Carl Jr ,
T. H. Baum ,
P. C. Van Buskirk ,
R. R. Woolcott Jr  and
A. I. Kingon
J. F. Roeder
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Dr., Danbury, CT 06810
S. M. Bilodeau
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Dr., Danbury, CT 06810
R. J. Carl Jr
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Dr., Danbury, CT 06810
T. H. Baum
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Dr., Danbury, CT 06810
P. C. Van Buskirk
Affiliation:
Advanced Technology Materials, Inc., 7 Commerce Dr., Danbury, CT 06810
R. R. Woolcott Jr
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695
A. I. Kingon
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695
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Abstract

A unique approach to MOCVD of complex oxides enables deposition of a number of materials of technological importance through the use of liquid delivery of metalorganic precursors. Methodologies for control of composition and exploration of. process space are compared for two film systems, one in a relatively mature state of development ((Ba,Sr)Ti03), the other in an early state of development (Ni-ferrite). In both cases, composition was controlled by mixing metalorganic precursors dissolved in solvents using a liquid delivery system. Films with excellent crystalline quality were deposited in both cases. Polycrystalline BST films displayed properties suitable for DRAM applications: charge storage densities > 80 fF/μm2 and leakage current density < 10−8 A/cm2 for films as thin as 15 nm. Growth mechanisms and rates were determined for the single component oxides of the ferrite films. Epitaxial NiFe204 films were deposited on MgO single crystal substrates at 650°C; x-ray rocking curves yielded FWHM values of 0.046°, commensurate with the substrate.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 474: Symposium L – Epitaxial Oxide Thin Films III , 1997 , 21
Copyright
Copyright © Materials Research Society 1997

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