Hostname: page-component-7479d7b7d-pfhbr Total loading time: 0 Render date: 2024-07-11T01:27:12.586Z Has data issue: false hasContentIssue false
  • English
  • Français

Modelling of Pyrolytic Laser Direct-Writing from Thin Metalorganic Films

Published online by Cambridge University Press:  25 February 2011

Peter E. Price Jr.  and
Klavs F. Jensen
Peter E. Price Jr.
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455
Klavs F. Jensen
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455
Get access

Abstract

A one-dimensional model for pyrolytic laser direct-writing of metal features from thin metalorganic films is presented. The model extends previous results for scanning laser crystallization by including separate but coupled mass and energy balances and allowing for variations in the optical properties and thermal conductivity in the film as it decomposes. A finite element approach is used to obtain solutions to the steady state and transient model forms. The model predicts the existence of multiple steady states for a range of laser powers when the optical absorbance is a nonlinear function of the fractional conversion in the film. These predictions agree qualitatively with multiple steady states that have been observed in direct-writing of palladium features from palladium acetate films. Experimental results that demonstrate multiplicity in the palladium acetate system are presented. The model also predicts the existence of periodic solutions that correspond to the periodic features that have been reported for direct-writing of gold features from organogold films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 129: Symposium B – Laser and Particle-Beam Modification of Chemical Processes on Surfaces , 1988 , 107
Copyright
Copyright © Materials Research Society 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Gerassimov, R.B., Metev, S.M., Savtchenko, S.K., Kotov, G.A. and Veiko, V.P., Appl. Phys. B 28, 266 (1982).Google Scholar
2. Jan, R.Y. and Allen, S.D., SPIE Vol. 459 Laser Assisted Deposition, and Doping (1984) pp. 71–6.CrossRefGoogle Scholar
3. Fisanick, G.J., Gross, M.E., Hopkins, J.B., Fennell, M.D., Schnoes, K.J. and Katzir, A., J. Appl. Phys. 57, 1139 (1985).CrossRefGoogle Scholar
4. Gross, M.E., Fisanick, G.J., Gallagher, P.K., Schnoes, K.J., and Fennel, M.D., Appl. Phys. Lett. 47, 923 (1985).CrossRefGoogle Scholar
5. Fisanick, G.J., Hopkins, J.B., Gross, M.E., Fennell, M.D., and Schnoes, K.J., Appl. Phys. Lett. 46, 1184 (1985).CrossRefGoogle Scholar
6. Gross, M.E., Appelbaum, A. and Schnoes, K.J., J. Appl. Phys. 60, 529 (1986).CrossRefGoogle Scholar
7. Gross, M.E., Appelbaum, A. and Gallagher, P.K., J. Appl. Phys. 61, 1628 (1987).CrossRefGoogle Scholar
8. Gross, M.E., Brown, W.L., Linnros, J., Harriott, L.R., Cummings, K.D. and Funsten, H.O., in Photon, Beam, and Plasma Stimulated Chemicals at Surfaces, Vol. 75 of the Proceedings of the Materials Research Society, Donnelly, V.M., Herman, I.P. and Hirose, M. (eds.), Elsevier: New York (1987), pp. 91–97.Google Scholar
9. Baufay, L. and Gross, M.E., in Laser and Particle-Beam Chemical Processing for Microelectronics, Vol. 101 of the Materials Research Society Symposium Proceedings, Ehrlich, D.J., Higashi, G.S., and Oprysko, M.M. (eds.), Materials Research Society: Pittsburgh, PA (1988), pp. 89–94.Google Scholar
10. Gupta, A. and Jagannathan, R., Appl. Phys. Lett. 51, 2254 (1987).CrossRefGoogle Scholar
11. Gupta, A., Sausa, R.C. and White, J.R., in Photon, Beam, and Plasma Stimulated Chemical Processes at Surfaces, Vol. 75 of the Proceedings of the Materials Research Society, Donnelly, V.M., Herman, I.P. and Hirose, M. (eds.), Elsevier: New York (1987), pp 83–90.Google Scholar
12. Fan, J.C.C., Zeiger, H.J., Gale, R.P. and Chapman, R.L., Appl. Phys. Lett. 36, 158 (1980).CrossRefGoogle Scholar
13. Chapman, R.L., Fan, J.C.C., Zeiger, H.J. and Gale, R.P., Appl. Phys. Lett. 37, 292 (1980).CrossRefGoogle Scholar
14. Zeiger, H.J., Fan, J.C.C., Palm, B.J., Gale, R.P. and Chapman, R.L., in Laser and Electron Beam Processing of Materials, White, C.W. and Peercy, P.S. (eds.), Academic Press: New York (1980), pp. 234–240.CrossRefGoogle Scholar
15. Zeiger, H.J., Fan, J.C.C., Palm, B.J., Chapman, R.L. and Gale, R.P., Phys. Rev. B 25, 4002 (1982).CrossRefGoogle Scholar
16. Lemons, R.A. and Bosch, M.A., Appl. Phys. Lett. 39, 343 (1981).CrossRefGoogle Scholar
17. Bensahel, D. and Auvert, G., in Laser-Solid Interactions and Transient Thermal Processing of Materials, Vol. 13 of the Materials Research Society Symposium Proceedings, Narayan, J., Brown, W.L. and Lemons, R.A. (eds.), Materials Research Society: Pittsburgh, PA (1983), pp. 165–176.Google Scholar
18. Kurtze, D.A., Saarloos, W. van and Weeks, J.D., Phys. Rev. B 30, 1398 (1984).CrossRefGoogle Scholar
19. Gilmer, G.H. and Leamy, H.J., in Laser and Electron Beam Processing of Materials, White, C.W. and Peercy, P.S. (eds.), Academic Press: New York (1980), pp. 227–233.CrossRefGoogle Scholar
20. Saarloos, W. van and Weeks, J.D., Physica D 12, 279 (1984).CrossRefGoogle Scholar
21. Gallagher, P.K. and Gross, M.E., J. Therm. Anal. 31, 1231 (1986).CrossRefGoogle Scholar
22. Morbidelli, M., Varma, A. and Aris, R., in Chemical Reaction and Reactor Engineering, Carberry, J.J. and Varma, A. (eds.), Marcel Dekker: New York, pp. 973–1054.Google Scholar
23. Razón, L.F. and Schmitz, R.A., Chem. Eng. Sci. 42, 1005 (1987).CrossRefGoogle Scholar
24. Jensen, K.F. and Ray, W.H., Chem. Eng. Sci. 37, 199 (1982).CrossRefGoogle Scholar
25. Strang, G. and Fix, G.J., An Analysis of the Finite Element Method, Prentice Hall: Prentice Hall, NJ (1973).Google Scholar
26. Dhatt, G. and Touzot, G., The Finite Element Method Displayed, Wiley: Chichester, England (1984).Google Scholar
27. Keller, H.B., in Applications of Bifurcation Theory, Rabinowitz, P.H. (ed.), Academic Press: New York (1977), pp. 359–384.Google Scholar
28. Hindmarsh, A.C., A CM SIGNUM Newsletter 15, 10 (1980).CrossRefGoogle Scholar
29. Thompson, J.M.T. and Stewart, H.B., Nonlinear Dynamics and Chaos, John Wiley and Sons: New York (1986).Google Scholar
30. Bäuerle, D., Chemical Processing with Lasers, Springer Verlag: Berlin (1986), p. 113.CrossRefGoogle Scholar