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Multilayer E-Beam Deposition and Annealing of Yba2Cu3O7-δ Thin Films on Lagao3 Substrates

Published online by Cambridge University Press:  28 February 2011

Richard DeVito ,
Brian G. Pazol ,
John H. Chaffin ,
Roger F. Belt  and
Robert Uhrin
Richard DeVito
Affiliation:
Litton/Itek Optical Systems, 10 Maguire Road, Lexington, MA 02173
Brian G. Pazol
Affiliation:
Litton/Itek Optical Systems, 10 Maguire Road, Lexington, MA 02173
John H. Chaffin
Affiliation:
Litton/Itek Optical Systems, 10 Maguire Road, Lexington, MA 02173
Roger F. Belt
Affiliation:
Litton/Airtron, 200 East Hanover Avenue, Morris Plains, NJ 07950
Robert Uhrin
Affiliation:
Litton/Airtron, 200 East Hanover Avenue, Morris Plains, NJ 07950
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Abstract

Thin films of YBa2Cu3O7‐δ have been deposited on samples of LaGaO3 substrates by multilayer E‐beam evaporation. Alternating layers of Cu, Y2O3, and BaF2 were deposited on polished (001) substrates. An annealing study was performed to thoroughly blend the layers and minimize substrate interdiffusion. Films were prepared by annealing in wet oxygen at temperatures between 800 °C and 1000 °C. Four point resistance versus temperature curves were obtained to determine the superconducting transition temperature and transition width. Auger depth profiling was performed as a function of annealing cycle to determine the amount of blending of the layers and quantify any substrate diffusion..

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 169: Symposium M – High Temperature Superconductors: Fundamental Properties and Novel Materials Processing , 1989 , 687
Copyright
Copyright © Materials Research Society 1990

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References

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