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Nonlinear Micro-Processing of Silicon by Ultrafast Fiber Laser at 1552 nm

Published online by Cambridge University Press:  19 September 2011

Yoshiro Ito ,
Rie Tanabe  and
Kozo Tada
Yoshiro Ito
Affiliation:
Department of Mechanical Engineering, Nagaoka University of Technology, Kamitomioka, Nagaoka, Niigata 940-2188, Japan
Rie Tanabe
Affiliation:
Department of Mechanical Engineering, Nagaoka University of Technology, Kamitomioka, Nagaoka, Niigata 940-2188, Japan
Kozo Tada
Affiliation:
Citizen Finetech Miyota, 353, Yaehara, Tomi, Nagano 289-0406, Japan
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Abstract

Processing of transparent materials by non-linear absorption mechanisms induced by short pulse lasers has been applied in many fields. Silicon (Si) is widely used materials in microelectronics, MEMS and photonics. It is, however, not transparent for commonly used processing lasers in near infrared to ultraviolet spectral range and has not been a subject for the non-linear processing by lasers so far. In this paper, possibilities and capabilities of non-linear processing of Si by 900 fs, 1552nm laser radiation are described with special emphasis on application to frequency adjustment of a crystal oscillator in a package made from Si.

Keywords

laser ablationSimachining
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1365: Symposium TT – Laser-Material Interactions at Micro/Nanoscales , 2011 , mrss11-1365-tt02-05
Copyright
Copyright © Materials Research Society 2011

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References

REFERENCES

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