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On The Optimized Nucleation of Near-Single-Crystal Cvd Diamond Film

Published online by Cambridge University Press:  10 February 2011

L. C. Chen ,
C. C. Juan ,
J. Y. Wu ,
K. H. Chen  and
J. W. Teng
L. C. Chen
Affiliation:
Center for Condensed Matter Sciences, National Taiwan University, Taipei, Taiwan
C. C. Juan
Affiliation:
Department of Chemical Engineering, National Taiwan Institute of Technology, Taipei, Taiwan
J. Y. Wu
Affiliation:
Physics Department, National Sun-Yat-Sen University, Kaohsiung, Taiwan
K. H. Chen
Affiliation:
Center for Condensed Matter Sciences, National Taiwan University, Taipei, Taiwan Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei, Taiwan
J. W. Teng
Affiliation:
Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei, Taiwan
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Abstract

Near-single-crystal diamond films have been obtained in a number of laboratories recently. The optimization of nucleation density by using a bias-enhanced nucleation (BEN) method is believed to be a critical step. However, the condition of optimized nucleation has never been clearly delineated. In the present report, a novel quantitative technique was established to monitor the nucleation of diamond in-situ. Specifically, the induced current was measured as a function of nucleation time during BEN. The timedependence of induced current was studied under various methane concentrations as well as substrate temperatures. The optimized nucleation condition can be unambiguously determined from the current-time plot. Besides the in-situ current probe, ex-situ x-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) were also used to investigate the chemical and morphological evolution. Characteristic XPS and AFM features of optimized nucleation is discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 416: Symposium DD – Diamond for Electronic Applications , 1995 , 81
Copyright
Copyright © Materials Research Society 1996

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References

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