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Optical Interconnect Components for Wafer Level Heterogeneous Hyper-Integration
Published online by Cambridge University Press: 17 March 2011
Abstract
Optical waveguides for three-dimensionally stacked chip fabrication technologies, in which optical connection between layers plays a central role, are described. CMOS-compatible approaches to optical via and waveguide fabrication are addressed. Detailed modeling is used for design optimization and also addresses how manufacturing variations from ideal design may affect device performance.
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- Research Article
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- Copyright © Materials Research Society 2004
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