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Origin of the Laser-Induced Broad Band Luminescence from a WF6/H2/Ar Gas Mixture
Published online by Cambridge University Press: 25 February 2011
Abstract
The origin of the ArF excimer laser induced luminescence from a WF6/H2/Ar gas mixture was investigated. The experiments prove that the emission originates from excited W clusters with a size of about 10-20 nm. The influence of the H2 and Ar concentrations, the laser fluence and the repetition rate on the light intensity was studied.
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- Copyright © Materials Research Society 1992
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