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Picosecond Dynamics of Laser Annealing
Published online by Cambridge University Press: 15 February 2011
Abstract
We report simultaneous measurements of time resolved reflection and transmission of low intensity 1.06 μm, 35 ps pulses subsequent to excitation of 50 KeV, 1016 cm−2 boron implanted silicon by 0.53 μm 35 ps pulses of varying energy densities. The samples are examined by optical and scanning electron microscopy in conjunction with defect etching. These data are discussed from the point of view of both the thermal melting model and plasma model.
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- Copyright © Materials Research Society 1982
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