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Plasma Diagnostics by Laser-Induced Fluorescence
Published online by Cambridge University Press: 22 February 2011
Abstract
RF plasmas of CFM4 have been investigated by laser-induced fluorescence (LIF). Ground state CF2 and CF radicals have been observed under a variety of experimental conditions, where LIF has enabled spatial and temporal distributions to be found. In addition, absolute concentrations have been measured and the processes of radical production and removal have been examined.
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- Copyright © Materials Research Society 1988
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