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The Preparation of Some Silicon (OXY)Nitrides
Published online by Cambridge University Press: 25 February 2011
Abstract
Various routes to silicon (oxy)nitrides are described, using both low-temperature solution chemistry and high temperature gas-solid reactions. The latter approach has led to a convenient synthesis of high-surface-area (e.g. 130 m g) silicon oxynitride, Si2N2O, from gaseous ammonia and commercially available, finely divided amorphous silica.
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- Copyright © Materials Research Society 1988
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