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Probing strain and microstrain in nanostructured thin layers.

Published online by Cambridge University Press:  12 April 2012

Gianguido Baldinozzi ,
David Simeone ,
Dominique Gosset  and
Jean-Francois Bérar
Gianguido Baldinozzi
Affiliation:
SPMS, Equipe Matériaux Fonctionnels pour l’Energie, CNRS, Ecole Centrale Paris, Châtenay-Malabry, France; DEN, DMN, CEA, CE Saclay, Gif-sur-Yvette, France
David Simeone
Affiliation:
SPMS, Equipe Matériaux Fonctionnels pour l’Energie, CNRS, Ecole Centrale Paris, Châtenay-Malabry, France; DEN, DMN, CEA, CE Saclay, Gif-sur-Yvette, France
Dominique Gosset
Affiliation:
SPMS, Equipe Matériaux Fonctionnels pour l’Energie, CNRS, Ecole Centrale Paris, Châtenay-Malabry, France; DEN, DMN, CEA, CE Saclay, Gif-sur-Yvette, France
Jean-Francois Bérar
Affiliation:
Institut Neel, CNRS, Grenoble, France.
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Abstract

The analysis of the structures and microstructures of nanostructured thin layers can be performed using laboratory grazing incidence diffraction, provided accurate corrections are performed to handle the instrumental broadening effects related to the experiment geometry for an impinging beam close to the critical angle. Implementing these corrections in Rietveld refinement software allows the accurate extraction of quantitative relevant information about the structure (strain and atomic positions) and the microstructure (crystallite size and microstrain), selectively probing the material on a depth of few nanometers.

Keywords

nanostructurex-ray diffraction (XRD)thin film
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1424: Symposium SS – Properties and Processes at the Nanoscale Nanomechanics of Material Behavior , 2012 , mrsf11-1424-ss15-43
Copyright
Copyright © Materials Research Society 2012

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References

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