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Progress and Prospects of Materials Characterization at Subnanometer Spatial Resolution using Finely Focussed Electron Beams
Published online by Cambridge University Press: 22 February 2011
Abstract
The prospects of microanalysis using 0.5 nm diameter electron beams are reviewed. This paper will discuss the various characterization possibilities with emphasis on incoherent imaging, energy loss spectroscopy and convergent probe diffraction. Some examples indicating characterization at a 0.5 nm lateral spatial resolution scale will be presented and we will conclude with a discussion of the limits of nanometer characterization.
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- Copyright © Materials Research Society 1985