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Pulsed Plasma Polymerizations: Film Chemistry Control and Applications

Published online by Cambridge University Press:  10 February 2011

Yuliang WU ,
Licheng M. Han ,
Brett E. Thomes ,
Haibo Qiu ,
Charles R. Savage ,
Wei W. Lee  and
Richard B. Timmons
Yuliang WU
Affiliation:
Chemistry and Biochemistry Department and Materials Science and Engineering Program, University of Texas at Arlington, Arlington, Texas 76019-0065
Licheng M. Han
Affiliation:
Chemistry and Biochemistry Department and Materials Science and Engineering Program, University of Texas at Arlington, Arlington, Texas 76019-0065
Brett E. Thomes
Affiliation:
Chemistry and Biochemistry Department and Materials Science and Engineering Program, University of Texas at Arlington, Arlington, Texas 76019-0065
Haibo Qiu
Affiliation:
Chemistry and Biochemistry Department and Materials Science and Engineering Program, University of Texas at Arlington, Arlington, Texas 76019-0065
Charles R. Savage
Affiliation:
Chemistry and Biochemistry Department and Materials Science and Engineering Program, University of Texas at Arlington, Arlington, Texas 76019-0065
Wei W. Lee
Affiliation:
Kilby Center, Texas Instruments Inc., Dallas, Texas 75243
Richard B. Timmons
Affiliation:
Chemistry and Biochemistry Department and Materials Science and Engineering Program, University of Texas at Arlington, Arlington, Texas 76019-0065
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Abstract

Film chemistry control issues, as well as key properties of polymers synthesized under pulsed plasma conditions, are discussed. Distinctions between pulsed and continuous wave plasmas are examined, particularly as they relate to differences in the energy efficiency of film formation rates and to the range of available power inputs. Film stabilities, with special reference to polymers formed under very low power input conditions, are considered. Finally, selected applications involving use of the inherently high film chemistry controllability made available by the variable duty cycle pulsed plasma technique are described.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 544: Symposium Y – Plasma Deposition and Treatment of Polymers , 1998 , 77
Copyright
Copyright © Materials Research Society 1999

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References

1. Friedl, A., Fukarek, W., Mdller, W. and Koch, A., Rev. Sci. Instrum. 65, 2882 (1994).Google Scholar
2. Canillas, A., Pascual, E. and Drdvillon, B., Rev. Sci. Instrum. 64, 2153 (1993).Google Scholar
3. Etemadi, R., Godet, C., Perrin, J., Drvillon, B., Hue, J., Parey, J.Y., Rostaing, J.C. and Coeuret, F., J. Vac. Sci. Technol. A 15, 320 (1997).Google Scholar
4. Godet, C., Heitz, T., Dr~villon, B., Bourde, J.E. and Clerc, C., J. Appl. Phys. 84, 3919 (1998).Google Scholar
5. Heitz, T., Dr~villon, B., Godet, C. and Bour~e, J.E., Phys. Rev B 58, 13957 (1998).Google Scholar
6. Heitz, T., Dr~villon, B., Bour~e, J.E. and Godet, C., Appl. Phys. Lett. 72, 780 (1998).Google Scholar
7. Wexler, A.S., Spectrochim. Acta 21, 1725 (1965).Google Scholar
8. Honeybone, P.J., Newport, R.J., Howells, W.S., Tomkinson, J., Bennington, S.B. and Revell, P.J., Chem. Phys. Lett. 180, 145 (1991).Google Scholar