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Raman Spectroscopy: A Unique Tool for the Study of Thin Films
Published online by Cambridge University Press: 14 March 2011
Abstract
In this paper, the different applications of Raman spectroscopy for the study of thin films is briefly discussed, using examples from microelectronics. Special attention is given to the application of micro-Raman spectroscopy for the measurement of local stress in and near films.
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- Copyright © Materials Research Society 2000
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