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Recursive Image Charge Approach for Quantitative Characterization of Dielectric Thin Film Library Using Scanning Tip Microwave Near-field Microscopy
Published online by Cambridge University Press: 01 February 2011
Abstract
We developed a recursive image charge approach for quantitative characterizations of dielectric thin films using the scanning tip microwave near-field microscope. With this method, frequency shift of the microscope as functions of the dielectric constant and the thickness of a film can be effectively computed in a recursive way. We believe that this approach can promote the high-throughput characterization of the dielectric libraries.
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- Copyright © Materials Research Society 2004