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Reflective Infrared Spectra of PECVD Thin Films on Glass Substrate
Published online by Cambridge University Press: 10 February 2011
Abstract
In order to use a reflective FTIR measurement to evaluate thin films deposited on glass substrate, we have to consider several important factors, such as surface polarization, phase shift, and interference from different interfaces. PECVD thin films, oxide, nitride and a-Si:H deposited on top of the glass substrate are discussed by the reflective FTIR measurement.
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- Copyright © Materials Research Society 1998