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Removal of Surface Carbon Impurities from Ultra-Low Loss Fluoride Glasses
Published online by Cambridge University Press: 25 February 2011
Abstract
This paper describes a novel route for removal of surface carbon from heavy-metal fluoride glasses melted in vitreous carbon crucibles. The technique utilizes dry etching with active fluorine produced in a NF3 plasma generated in a microwave cavity.
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- Copyright © Materials Research Society 1992