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A Semiconductor-based Field-effect Platform for (Bio-)Chemical and Physical sensors: From Capacitive EIS Sensors and LAPS over ISFETs to Nano-scale Devices

Published online by Cambridge University Press:  01 February 2011

Michael J. Schöning ,
Maryam H. Abouzar ,
Torsten Wagner ,
Niko Näther ,
David Rolka ,
Tatsuo Yoshinobu ,
Joachim P. Kloock ,
Monika Turek ,
Sven Ingebrandt  and
Arshak Poghossian
Michael J. Schöning
Affiliation:
m.j.schoening@fz-juelich.de, Aachen University of Applied Sciences, Laboratory for Chemical Sensors and Biosensors, Ginsterweg 1, Juelich, 52428, Germany
Maryam H. Abouzar
Affiliation:
m.hadji-abouzar@fh-aachen.de, Aachen University of Applied Sciences, Laboratory for Chemical Sensors and Biosensors, Ginsterweg 1, Juelich, 52428, Germany
Torsten Wagner
Affiliation:
torsten.wagner@fh-aachen.de, Aachen University of Applied Sciences, Laboratory for Chemical Sensors and Biosensors, Ginsterweg 1, Juelich, 52428, Germany
Niko Näther
Affiliation:
naether@fh-aachen.de, Aachen University of Applied Sciences, Laboratory for Chemical Sensors and Biosensors, Ginsterweg 1, Juelich, 52428, Germany
David Rolka
Affiliation:
rolka@fh-aachen.de, Research Centre Juelich, Institute of Bio- and Nanosystems, Juelich, 52425, Germany
Tatsuo Yoshinobu
Affiliation:
nov@ecei.tohoku.ac.jp, Tohoku University, Department of Electronic Engineering, Sendai, 980-8579, Japan
Joachim P. Kloock
Affiliation:
kloock@fh-aachen.de, Aachen University of Applied Sciences, Laboratory for Chemical Sensors and Biosensors, Ginsterweg 1, Juelich, 52428, Germany
Monika Turek
Affiliation:
turek@fh-aachen.de, Aachen University of Applied Sciences, Laboratory for Chemical Sensors and Biosensors, Ginsterweg 1, Juelich, 52428, Germany
Sven Ingebrandt
Affiliation:
s.ingebrandt@fz-juelich.de, Research Centre Juelich, Institute of Bio- and Nanosystems, Juelich, 52425, Germany
Arshak Poghossian
Affiliation:
a.poghossian@fz-juelich.de, Aachen University of Applied Sciences, Laboratory for Chemical Sensors and Biosensors, Ginsterweg 1, Juelich, 52428, Germany
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Abstract

The coupling of semiconductor field-effect devices (FED) together with chemical and biological recognition elements, like functional intelligent materials, biomolecules and living cells, represents an attractive platform for the creation of different (bio-)chemical sensors, multi-parameter analysis systems and bio-chips. This paper summarises recent developments and current research activities in the field of (bio-)chemically modified FEDs, scaling down from capacitive EIS (electrolyte-insulator-semiconductor) sensors and LAPS (light-addressable potentiometric sensor) to ISFETs (ion-sensitive field-effect transistor) that have been realised in our laboratory. Selected examples of application of ISFETs for the detection of physical parameters in liquids are presented, too. With the aim of future development of nano-devices for the detection of single biomolecules, the possibility of a simple preparation of different self-aligned nano-structures by using conventional photolithography and pattern-size reduction technique has been experimentally demonstrated.

Keywords

sensormicrostructurenanoscale
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 952: Symposium F – Integrated Nanosensors , 2006 , 0952-F08-02
Copyright
Copyright © Materials Research Society 2007

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