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A short review and Present Status of ZnO Nanoparticle Formation by Ion Implantation Combined with Thermal Oxidation

Published online by Cambridge University Press:  26 February 2011

Hiroshi Amekura ,
Oleg A Plaksin ,
Naoki Umeda ,
Yoshihiko Takeda ,
Naoki Kishimoto  and
Christoph Buchal
Hiroshi Amekura
Affiliation:
amekura.hiroshi@nims.go.jp, National Institute for Materials Science, Nanomaterials Laboratory, 3-13 Sakura, Tsukuba, Ibaraki, 305-0003, Japan, +81-29-863-5479, +81-29-863-5599
Oleg A Plaksin
Affiliation:
oleg.plaxine@nims.go.jp, National Institute for Materials Science, Nanomaterials Laboratory, Japan
Naoki Umeda
Affiliation:
umeda.naoki@nims.go.jp, National Institute for Materials Science, Nanomaterials Laboratory
Yoshihiko Takeda
Affiliation:
takeda.yoshihiko@nims.go.jp, National Institute for Materials Science, Nanomaterials Laboratory
Naoki Kishimoto
Affiliation:
kishimoto.naoki@nims.go.jp, National Institute for Materials Science, Nanomaterials Laboratory
Christoph Buchal
Affiliation:
c.buchal@fz-juelich.de, Forschungszentrum, ISG1-IT, Germany
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Abstract

Recently many groups have started studies of formation of zinc-oxide (ZnO) nanoparticle (NP) in transparent insulators, such as silica glass, sapphire, etc, using ion implantation techniques. In the early half of this article, we shortly review recent activities of ZnO NP formation using ion implantation combined with thermal oxidation. Some groups succeeded but the others did not. Even if they succeeded in the formation of ZnO nanostructures, one reported that they were in the shape of thin film and another reported the NP form. Based on our recent experimental results, we point out the importance of the oxidation temperature and the peculiar shapes and depth profiles of ZnO formed.

Keywords

nanostructureion-beam processingZn
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 908: Symposium OO – Growth, Modification, and Analysis by Ion Beams at the Nanoscale , 2005 , 0908-OO08-01
Copyright
Copyright © Materials Research Society 2006

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