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Some Applications of Ion Beams in III-V Compound Semiconductor Device Fabrication
Published online by Cambridge University Press: 26 February 2011
Abstract
Ion-beam-assisted etching of GaAs/AlGaAs and InP/GaInAsP, ion-beam disordering of GaAs/AlGaAs multiple-quantum-well structures, and ion implantation in InP are discussed.
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- Copyright © Materials Research Society 1989
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