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Some Recent Results of Fundamental Studies on Beam-Induced Surface Processes

Published online by Cambridge University Press:  25 February 2011

Jan Dieleman
Jan Dieleman*
Affiliation:
Philips Research Laboratories 5600 JA Eindhoven, The Netherlands
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Extract

Recent results of studies on the mechanism of processes induced by the interaction of beams of (reactive) particles with surfaces in UHV, often combined with concurrent bombardment of the surface with low-energy ion or excimer laser beams, are reviewed. Angular-resolved mass spectrometry combined with time-of-flight studies on the desorbing products is used as a key diagnostic. A more complete picture is obtained using several other diagnostic tools to characterize the surface before, during or after the interaction. Interactions at Si and Cu surfaces will be emphasized. The review will deal successively with data for interaction with a single beam of Cl2, low-energy noble gas ions or excimer laser pulses, followed by data on the concurrent interaction of crossed beams of Cl2 and low-energy noble gas ions or excimer laser pulses with these surfaces. Some conclusions will be drawn.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 128: Symposium A – Processing and Characterization of Materials Using Ion Beams , 1988 , 3
Copyright
Copyright © Materials Research Society 1989

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