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Thermo-Mechanical and Size-Dependent Behavior of Freestanding AuAg and Nanoporous-Au Beams

Published online by Cambridge University Press:  26 February 2011

Erkin Seker ,
Jianzhong Zhu ,
Hilary Bart-Smith ,
Matthew Begley ,
Robert Kelly ,
Giovanni Zangari  and
Michael L. Reed
Erkin Seker
Affiliation:
erkin@virginia.edu, University of Virginia, Electrical and Computer Engineering, 1410 Grady Ave. #19, Charlottesville, VA, 22903, United States, 434-409-9056
Jianzhong Zhu
Affiliation:
jz8n@virginia.edu, University of Virginia, Electrical and Computer Engineering, Charlottesville, VA, 22904, United States
Hilary Bart-Smith
Affiliation:
hb8h@virginia.edu, University of Virginia, Mechanical and Aerospace Engineering, Charlottesville, VA, 22904, United States
Matthew Begley
Affiliation:
begley@virginia.edu, University of Virginia, Mechanical and Aerospace Engineering, Charlottesville, VA, 22904, United States
Robert Kelly
Affiliation:
rgk6y@virginia.edu, University of Virginia, Materials Science and Engineering, Charlottesville, VA, 22904, United States
Giovanni Zangari
Affiliation:
gz3e@virginia.edu, University of Virginia, Materials Science and Engineering, Charlottesville, VA, 22904, United States
Michael L. Reed
Affiliation:
reed@virginia.edu, University of Virginia, Electrical and Computer Engineering, Charlottesville, VA, 22904, United States
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Abstract

Nanoporous gold (np-Au), produced by selectively removing silver from an AuAg alloy, has recently gained considerable attention from the scientific community. Biocompatibility, chemical inertness, increased surface area, relatively low elastic modulus, and ease of synthesis make np-Au an important candidate for biomedical, catalytic, and MEMS applications. Np-Au films also offer substantial ground for theoretical and empirical research, including mechanical characterization, fracture mechanics, and porosity evolution. Even though a significant effort has been directed towards exploring blanket np-Au films (i.e., foils, strips), to our knowledge no work has been done on fabricating or investigating freestanding np-Au structures (i.e., micro-beams, cantilevers). Recently we have developed techniques to create freestanding clamped np-Au beams with widths from 5 to 40 microns and lengths from 20 to 500 microns. The percentage yield was more than 97% for 2880 beams on a 2-inch wafer. A critical step in the fabrication process, necessary to prevent tensile failure of the beams during dealloying, is a thermal heat treatment prior to dealloying. The study of thermal treatment of beams at temperatures between 100°C and 600°C prior to dealloying revealed three distinct beam behavior regimes, namely quasi-elastic buckling, plastic buckling, and material interdiffusion. This paper will present the preliminary results from thermal treatment experiments particularly focusing on how beam dimensions affect percentage yield and beam fracture.

Keywords

annealingmicroelectro-mechanical (MEMS)porosity
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 976: Symposium EE – Size Effects in the Deformation of Materials – Experiments and Modeling , 2006 , 0976-EE06-09
Copyright
Copyright © Materials Research Society 2007

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