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The “Hook Effect” of X-Ray Diffraction Peak Broadening of Multilayer Thin Films

Published online by Cambridge University Press:  10 January 2013

Liu Dengfa
Affiliation:
Department of Metal Physics, Beijing University of Iron And Steel Technology, P.R., China
Wang Yuming
Affiliation:
Institute of Material Science, Jilin University, P.R., China

Abstract

The “hook effect” observed in the Warren-Averbach analysis of X-ray diffraction peaks from multiple layer thin films of copper has been investigated theoretically and experimentally. The strengths of the “hook effect” for films of different layer thicknesses were analyzed. The results showed definite correlation between the strengths of the “hook effect” and the grain size distributions in 1, 4, and 19-layer copper films.

Type
Research Article
Copyright
Copyright © Cambridge University Press 1987

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