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Quantitative analysis with the transition edge sensor microcalorimeter X-ray detector

Published online by Cambridge University Press:  01 March 2012

Terrence Jach ,
Nicholas Ritchie ,
Joel Ullom  and
James A. Beall
Terrence Jach
Affiliation:
Surface and Microanalysis Science Division, National Institute of Standards and Technology, Boulder, Colorado 80305
Nicholas Ritchie
Affiliation:
Surface and Microanalysis Science Division, National Institute of Standards and Technology, Boulder, Colorado 80305
Joel Ullom
Affiliation:
Quantum Electronics Division, National Institute of Standards and Technology, Colorado 80305
James A. Beall
Affiliation:
Quantum Electronics Division, National Institute of Standards and Technology, Colorado 80305
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Abstract

We report on the use of a microcalorimeter X-ray detector with a transition edge sensor in an electron probe to perform quantitative analysis. We analyzed two bulk samples of multielement glasses that have been previously characterized by chemical methods for use as standard reference materials. The spectra were analyzed against standards using three different correction schemes. In one of the standards, the reference line was easily resolved despite its proximity within 45 eV of another line. With the exception of direct measurements of oxygen (a particularly challenging element), the results are in agreement with the certified characterization to better than 1% absolute or 8% relative. This demonstrates the potential of microcalorimeter detectors as replacements for conventional energy dispersive detectors in applications requiring high energy resolution.

Keywords

X-ray detectormicrocalorimeterquantitative analysistransition-edge sensorspectroscopy
Type
X-Ray Fluorescence
Information
Powder Diffraction , Volume 22 , Issue 2 , June 2007 , pp. 138 - 141
Copyright
Copyright © Cambridge University Press 2007

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