An ultra-precision integrated robotic system is developed, which integrates a passive robotic measurement system (shadow system) with an industrial robot. The shadow system is built almost ideal. In a working process, when the end-effecter of integrated robot is driven to a target with errors which are caused by degrading factors associated with the robot, the shadow system will independently detect the end-effecter frame instantly with ultra-precision kinematic accuracy. A scheme of approach control is then established to drive the end-effecter of the integrated robot to compensate the error step by step until the desired target is achieved with ultra-precision positioning accuracy.