Hostname: page-component-77c89778f8-m42fx Total loading time: 0 Render date: 2024-07-16T17:25:06.072Z Has data issue: false hasContentIssue false
  • English
  • Français

Calibration of a 2 dimensional hydrogenated amorphous silicon thin film position sensitive detector (2D a-Si:H TFPSD)

Published online by Cambridge University Press:  03 October 2003

K. Gnanvo  and
Z. Y. Wu
K. Gnanvo*
Affiliation:
Département d'Optique, École Nationale Supérieure de Télécommunications de Bretagne, BP 832, 29285 Brest Cedex, France
Z. Y. Wu
Affiliation:
Département d'Optique, École Nationale Supérieure de Télécommunications de Bretagne, BP 832, 29285 Brest Cedex, France
*
kondo.gnanvo@enst-bretagne.fr
Get access

Abstract

It is well known that for a 2 dimensional hydrogenated amorphous silicon thin film position sensitive detector (a-Si:H TFPSD), the calculated coordinates of the position, from the currents measured on the PSD, do not represent the real spot position. The errors result from the generally used position-current expression, and also from device fabrication defects such as the inhomogeneity of TCO thickness and the electrode contact resistance. The best way to correct the errors is to calibrate the device. In this paper, we present a calibration method developed earlier for a smart pressure sensor to calibrate a 2D tetralateral a-Si:H TFPSD. The calibration algorithm is presented. Experimental results are shown and the calibration error is discussed.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 24 , Issue 3 , December 2003 , pp. 231 - 239
Copyright
© EDP Sciences, 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Gnanvo, K., Wu, Z.Y., de Bougrenet de, J.L. la Tocnaye, L. Liu, Appl. Opt. 41, 5997 (2002) CrossRef
K. Gnanvo, Étude d'un capteur de position de grandes dimensions : Application à la focométrie, Ph.D. thesis, Université de Bretagne occidentale, 2001
Gnanvo, K., Wu, Z.Y., Labouret, A., Solid State Electron. 44, 1191 (2000) CrossRef
Lucovsky, G., J. Appl. Phys. 31, 1088 (1960) CrossRef
Kumar Du, A.tta, Y. Hatanaka, Solid State Electron. 34, 875 (1991)
Hamamatsu product catalogue, 1998
Van der Horn, G., Huijsing, J.H., Anal. Integr. Circuits and Signal Process. 14, 207 (1997) CrossRef