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Deposition of titanium nitride on AISI-304 in a plasma focus environment

Published online by Cambridge University Press:  29 April 2008

S. Zeb
Affiliation:
Department of Physics, Quaid-i-Azam University, 45320 Islamabad, Pakistan
A. Qayyum
Affiliation:
National Tokamak Fusion Program 3329, Islamabad, Pakistan
M. Shafiq
Affiliation:
Department of Physics, Quaid-i-Azam University, 45320 Islamabad, Pakistan
M. Zakaullah*
Affiliation:
Department of Physics, Quaid-i-Azam University, 45320 Islamabad, Pakistan
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Abstract

Polycrystalline, smooth, and hard thin films of TiN are successfully deposited on AISI-304 substrates using a 1.5 kJ Mather-type dense plasma focus device charged at 18 kV. The purpose of this study is to investigate the structural and mechanical properties of the TiN thin films in terms of ion dose and substrate position to establish the optimum deposition conditions. The films are analyzed using XRD, SEM, electron microprobe and micro-hardness testing. XRD confirms the deposition of a polycrystalline TiN thin film together with the emergence of an iron chromium nickel phase. The surface hardness-in comparison to the unexposed substrate-is found to increase up to 250% when a film is deposited using 30 focus shots at an axial distance of 6 cm. SEM micrographs show that the quality of the film is improved with an increasing number of focus shots. The constituent elements of the film are also confirmed by electron microprobe.

Keywords

Type
Research Article
Copyright
© EDP Sciences, 2008

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References

Ljungcrantz, H., Oden, M., Hultman, L., Greene, J.E., Sundgren, J.E., J. Appl. Phys. 80, 6725 (1996) CrossRef
Johansson, B.O., Sundgren, J.E., Greene, J.E., Rockett, A., Barnett, S.A., J. Vac. Sci. Technol. A 3, 303 (1985) CrossRef
Petrov, I., Hultman, L., Sundgren, J.E., Greene, J.E., J. Vac Sci. Technol. A 10, 265 (1992) CrossRef
Chen, C.T., Song, Y.C., Yu, G.P., Huang, J.H., J. Mater. Eng. Perform. 7, 324 (1998) CrossRef
Petersson, J.R., J. Vac. Sci.Technol. 11, 715 (1974) CrossRef
Hummer, E., Perry, A.J., Thin Solid Films 101, 243 (1983) CrossRef
Coll, B.F., Chhowalla, M., Surf. Coat. Technol. 131, 68 (1994)
Biunno, N., Narayan, J., Hofmeister, S.K., Srivatsa, A.R., Singh, R.K., Appl. Phys. Lett. 56, 1519 (1990)
Mukherjee, S., Prokert, F., Richter, E., Moller, W., Surf. Coat. Technol. 200, 2459 (2005) CrossRef
Shimada, S., Takada, Y., Tsujino, T., Surf. Coat. Technol. 199, 72 (2005) CrossRef
Xin, M. Li, Han, Y., Electrochem. Commun. 8, 267 (2006)
Sagar, R., Srivastava, M.P., Phys. Lett. A 183, 209 (1993) CrossRef
Srivastava, M.P., Mohanty, S.R., Annapoorni, S., Rawat, R.S., Phys. Lett. A 215, 63 (1996) CrossRef
Agarwala, P., Annapoorni, S., Srivastava, M.P., Rawat, R.S., Chauhan, P., Phys. Lett. A 231, 434 (1997) CrossRef
Agarwala, P., Srivastava, M.P., Dheer, P.N., Padmanabhan, V.P.N., Gupta, A.K., Physica C 31, 87 (1999) CrossRef
Zhang, H.X., Jiang, Y.B., Yang, S.Z., Lin, Z.D., Feng, K.A., Thin Solid Films 349, 162 (1999) CrossRef
Zeb, S., Qayyum, A., Sadiq, M., Shafiq, M., Waheed, A., Zakaullah, M., Plasma Chem. Plasma Process. 27, 127 (2007) CrossRef
Rawat, R.S., Lee, P., White, T., Ying, Li, Lee, S., Surf. Coat. Technol. 138, 159 (2001) CrossRef
Rawat, R.S., Chew, W.M., Lee, P., White, T., Lee, S., Surf. Coat. Technol. 173, 276 (2003) CrossRef
Gupta, R., Srivastava, M.P., Balakrishnan, V.R., Kodama, R., Peterson, M.C.T., J. Phys. D: Appl. Phys. 37, 1091 (2004) CrossRef
Ahmad, R., Hassan, M., Murtaza, G., Akhter, J.I., Qayyum, A., Waheed, A., Zakaullah, M., Radiat. Eff. Defects Solids 161, 121 (2006) CrossRef
Hassan, M., Qayyum, A., Ahmad, R., Murtaza, G., Zakaullah, M., J. Phys. D: Appl. Phys. 40, 769 (2007) CrossRef
Gray, S.P., Hohl, F., Phys. Fluids 16, 997 (1973) CrossRef
Deutsch, R., Kies, W., Plasma Phys. Cont. Fusion 30, 263 (1988) CrossRef
Sadowski, M., Schmidt, H., Herold, H., Phys. Lett. A 83, 435 (1981) CrossRef
Ahmad, R., Hassan, M., Murtaza, G., Waheed, A., Zakaullah, M., J. Fusion Energy 21, 217 (2002) CrossRef
Rawat, R.S., Arun, P., Vedeshwar, A.G., Lee, P., Lee, S., J. Appl. Phys. 95, 7725 (2004) CrossRef