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Diminution of the activity of B atoms by H-induced defects inH2 and B2H6 co-implanted Si
Published online by Cambridge University Press: 15 July 2004
Abstract
Diborane and hydrogen ions were co-implanted into silicon using an
implanter without an ion analyzer. The samples were annealed at
1000 °C for 30 min in argon atmosphere. Regions containing
carriers became narrower with an increasing fraction of H2 gas in the
source mixed
gas: for example, carriers were limited only in a narrow region from the
surface to $0.3\;\mu$m on silicon implanted with a mixed gas of
57% H2–43% B2H6. The width of the region containing carriers
was approximately double that ($\sim 0.6\;\mu$
m) on B-implanted silicon.
On the other hand, the width of the region containing B atoms on the H2
and B2H6 co-implanted silicon were slightly narrower than that on
B-implanted silicon. The region containing inactivated B atoms had a
large number of defects and small crystallites.
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- © EDP Sciences, 2004
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