Hostname: page-component-77c89778f8-fv566 Total loading time: 0 Render date: 2024-07-21T10:45:08.505Z Has data issue: false hasContentIssue false
  • English
  • Français

Effect of annealing temperature on properties of ZnO thin films on Si(111) substrates by magnetron sputtering

Published online by Cambridge University Press:  06 October 2006

Shoubin Xue ,
Huizhao Zhuang ,
Chengshan Xue ,
Shuyun Teng  and
Lijun Hu
Shoubin Xue
Affiliation:
Institute of Semiconductor, Shandong Normal University, Jinan 250014, P.R. China
Huizhao Zhuang*
Affiliation:
Institute of Semiconductor, Shandong Normal University, Jinan 250014, P.R. China
Chengshan Xue
Affiliation:
Institute of Semiconductor, Shandong Normal University, Jinan 250014, P.R. China
Shuyun Teng
Affiliation:
Institute of Semiconductor, Shandong Normal University, Jinan 250014, P.R. China
Lijun Hu
Affiliation:
Institute of Semiconductor, Shandong Normal University, Jinan 250014, P.R. China
*
zhuanghuizhao@sdnu.edu.cn
Get access

Abstract

ZnO thin films were firstly prepared on Si(111) substrates using radio frequency magnetron sputtering system. Then the samples were annealed at different temperature in oxygen ambient and their properties were investigated particularly as a function of annealing temperature. The microstructure, morphology and optical property of ZnO films were studied by XRD, AFM, FTIR and PL. The results show that the increase of annealing temperature leads to the improvement in the crystal quality.

Keywords

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 36 , Issue 1 , October 2006 , pp. 1 - 4
Copyright
© EDP Sciences, 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Wenas, W.W., Yamada, A., Takahashi, K., J. Appl. Phys. 70, 7119 (1991) CrossRef
Ohta, H., Kawamura, K., Orita, M., Hirano, M., Sarukura, N., Hosono, H., Appl. Phys. Lett. 77, 475 (2000) CrossRef
Studenikin, S.A., Cocivera, M., Kellner, W., Pascher, H., J. Lumin. 91, 223 (2000) CrossRef
Park, W.I., An, S.J., Yi, G.Y., Jang, H.M., J. Mater. Res. 16, 784 (2001)
Bagnall, D.M., Chen, Y.F., Zhu, Z., Yao, T., Koyama, S., Shen, M.Y., Goto, T., Appl. Phys. Lett. 70, 2230 (1997) CrossRef
Kawasaki, M., Ohtomo, A., Ohkubo, I., Koinuma, H., Tang, Z.K., Yu, P., Wang, G.K.L., Zhang, B.P., Segawa, Y., Mater. Sci. Eng. B 56, 239 (1998) CrossRef
Fukumura, T., Jin, Z., Ohtomo, A., Koinumam, H., Kawasaki, M., Appl. Phys. Lett. 75, 3366 (1999) CrossRef
Zu, P., Tang, Z.K., Wong, G.K.L., Kawasaki, M., Ohtomo, A., Koinuma, H., Segawa, Y., Solid State Commun. 103, 459 (1997) CrossRef
Fujimura, N., Nishihara, T., Goto, S., Xua, J., Ito, T., J. Cryst. Growth 130, 269 (1993) CrossRef
R.D. Vispute, V. Talyansky, R.P. Sharma, S. Choopun, M. Downes, T. Venkatesan, Y.X. Li, L.G. Salamanca-Riba, A.A. Iliadis, K.A. Jones, J. McGarrity, Appl. Surf. Sci. 127–129, 431 (1998)
Zheng, J.P., Kwok, H.S., Thin Solid Films 232, 99 (1993) CrossRef
Shulin, Gu, Rong Zhang, Jingxi Sun, Ling Zhang, T.F. Kuech, Appl. Phys. Lett. 76, 23 (2000)
Gorla, C.R., Emanetoglu, N.W., Liang, S., Mayo, W.E., Lu, Y., Wraback, M., Shen, H., J. Appl. Phys. 85, 2595 (1999) CrossRef
Takuma Suzuki, Chihiro Harada, Hiroki Goto, et al., Curr. Appl. Phys. 4, 643 (2002)
Lin, B., Fu, Z., Zia, Y., Appl. Phys. Lett. 79, 943 (2001) CrossRef
Y.M. Sun, Ph.D. thesis, University of Science and Technology of China, 2000
Hamby, D.W., Lucca, D.A., Klopfstein, M.J., J. Appl. Phys. 97, 043504 (2005) CrossRef
Yang Zhang, Bixia Lin, Xiankai Sun, Zhuxi Fu, Appl. Phys. Lett. 86, 131910 (2005) CrossRef
M. Kawasaki, A. Ohtomo, H. Koinuma et al., Mat. Sci. Forum 264–268, 1459 (1998)
Tang, Z.K., Wong, G.K.L., Yu, P., Appl. Phys. Lett. 72, 3270 (1998) CrossRef
Bachari, E.M., Baud, G., Ben Amor, S. et al., Thin Solid Films 348, 165–172 (1999) CrossRef
Sun, Y., Miyasato, T., Wigmore, J.K., J. Appl. Phys. 85, 3377 (1999) CrossRef
Laidani, N., Capelletti, R., Elena, M., Guzman, L., Mariotto, G., Miotello, A., Mossi, P., Thin Solid Films 223, 114 (1993) CrossRef
Meng, G.W., Zhang, L.D., Qin, Y., Mo, C.M., Phillipp, F., Nanostruct. Mater. 12, 1003 (1999) CrossRef