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A mason type analysis of cylindrical ultrasonic micromotors
Published online by Cambridge University Press: 02 December 2003
Abstract
This article deals with the analytical modelling of piezoelectric cylindrical micromotors [Morita et al., Jpn J. Appl. Phys. 35, 3251 (1996) and IEEE Trans. Ultrason. Ferroelectr. and Frequency Control 45, 1178 (1998)] and supplements the kinematics analysis of Pin Lu et al. [Sens. and Actuators A 87, 194 (2001)]. The modelling, based on an equivalent electric circuit, is established using geometrical and electromechanical parameters for the different parts of the motor. It gives electromechanical characteristics and other useful values for motor design.
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- © EDP Sciences, 2004
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