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Influence of nitrogen impurities on the formation of active species in Ar-O2 plasmas
Published online by Cambridge University Press: 28 October 2011
Abstract
A self-consistent kinetic model was developed in order to study the production of active species in Ar-O2 surface-wave microwave plasmas with a relatively small N2 addition. It is shown that the Ar-O2-N2 mixture produces efficiently the same active species as an Ar-O2 discharge, including oxygen atoms, metastable O2(a1∆g) molecules and the VUV emitting Ar(4s) states. Furthermore, active N-containing species are additionally produced, in particular N atoms and NO ground-state and excited molecules, which makes the ternary mixture very interesting for numerous plasma applications.
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- © EDP Sciences, 2011
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