Hostname: page-component-5c6d5d7d68-wbk2r Total loading time: 0 Render date: 2024-08-15T20:25:10.053Z Has data issue: false hasContentIssue false

Study of the electron kinetics in cylindrical hollow cathodes by a multi-term approach

Published online by Cambridge University Press:  12 September 2002

F. Sigeneger*
Affiliation:
Institut für Niedertemperatur-Plasmaphysik, Friedrich-Ludwig-Jahn-Straße 19, 17489 Greifswald, Germany
R. Winkler
Affiliation:
Institut für Niedertemperatur-Plasmaphysik, Friedrich-Ludwig-Jahn-Straße 19, 17489 Greifswald, Germany
Get access

Abstract

The non-local kinetics of the electrons in a cylindrical, axially symmetric hollow cathode discharge is theoretically investigated. A new multi-term method for solving the inhomogeneous Boltzmann equation in cylindrical coordinates has been developed to adequately describe the pronounced anisotropy of the electron velocity distribution function expected in the cathode fall region. This method is based on a tensorial representation of the expansion of the electron velocity distribution function in spherical harmonics. The resultant hierarchy of component equations has been specified to cylindrical geometry with rotational symmetry and axial uniformity. A subset of component equations could be separated which determines the relevant distribution parts needed to analyze the radial behaviour of important electron properties in the hollow cathode. Using measured profiles of the electric field, this subset has numerically been solved for a helium plasma at a discharge current of some mA and a pressure of few torr. Based on this approach in addition to the radial variation of the energy distribution, that of important transport properties and collision rates is studied and the non-local particle and power balance of the electrons are analysed. Some theoretical results are compared with available experimental ones.

Keywords

Type
Research Article
Copyright
© EDP Sciences, 2002

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Adamowicz, T.M., Donkó, Z., Szalai, L., Rózsa, K., Kwasniewski, W., Appl. Phys. B 65, 613 (1997) CrossRef
Petrov, G.M., J. Phys. D: Appl. Phys. 30, 67 (1997) CrossRef
Donkó, Z., Szalai, L., Pockl, M., IEEE J. Quantum Electron. 34, 47 (1998) CrossRef
Tobin, R., IEEE J. Quantum Electron. 36, 1053 (2001) CrossRef
Csillag, L., Janossy, M., Appl. Phys. B 73, 55 (2001) CrossRef
Mills, R.L., Int. J. Hydrogen Energy 26, 579 (2001) CrossRef
Chen, Y.M., Yu, G.P., Huang, J.H., Surf. Coating Technol. 141, 156 (2001) CrossRef
Nakamura, M., Korzec, D., Aoki, T., Engemann, J., Hatanaka, Y., Appl. Surf. Sci. 175, 697 (2001) CrossRef
D'Couto, G.C., Tkach, G., Ashtiani, K.A., Hartsough, L., Kim, E., Mulpuri, R., Lee, D.B., Levy, K., Fissel, M., Choi, S., J. Vac. Sci. Technol. B 19, 244 (2001) CrossRef
Koltypin, E.A., Nastyukha, A.I., Smirnov, P.A., Sov. Phys.-Tech. Phys. 15, 1703 (1971)
K.H. Schoenbach, A. El-Habachi, W. Shi, M. Ciocca, Proc. of the XXIIIth Int. Conf. on Phenomena in Ionized Gases, Toulouse, 1997, Vol. 5, p. 22
Günter-Schulze, A., Z. Phys. 19, 313 (1923) CrossRef
Helm, H., Z. Naturforsch. 27a, 1812 (1972)
Stockhausen, G., Kock, M., J. Phys. D: Appl. Phys. 34, 1683 (2001) CrossRef
Hashiguchi, S., Hasikuni, M., Jpn. J. Appl. Phys. 28, 699 (1989) CrossRef
Kolobov, V.I., Tsendin, L.D., Plasma Sources Sci. Technol. 4, 551 (1995) CrossRef
R. Arslanbekov, A. Kudryavtsev, Electron kinetics in the cathode region of glow discharges. Plane and hollow cathodes, in Electron Kinetics and Application of Glow Discharges, edited by U. Kortshagen, L.D. Tsendin (New York and London, Plenum Press, 1998), Vol. 367 of NATO ASI Series B, p. 161
Hashiguchi, S., Hasikuni, M., Jpn. J. Appl. Phys. 27, 1010 (1988) CrossRef
Hashiguchi, S., IEEE Trans. Plasma Sci. 19, 297 (1991) CrossRef
Donkó, Z., Z. Naturforsch. 48a, 457 (1993)
Donkó, Z., Rózsa, K., Tobin, R.C., J. Phys. D: Appl. Phys. 29, 105 (1996) CrossRef
Fiala, A., Pitchford, L.C., Boeuf, J.P., Phys. Rev. E 49, 5607 (1994) CrossRef
A. Fiala, L.C. Pitchford, J.P. Boeuf, in Proc. of the XXIIth Int. Conf. on Phenomena in Ionized Gases, Hoboken, 1995,Vol. 4, p. 191
Donkó, Z., Phys. Rev. E 57, 7126 (1998) CrossRef
Kutasi, K., Donkó, Z., J. Phys. D: Appl. Phys. 33, 1081 (2000) CrossRef
Baguer, N., Bogaerts, A., Gijbels, R., Spectrochim. Acta Part B 57, 311 (2002) CrossRef
Petrov, G.M., Zhechev, D., Phys. Plasmas 9, 1815 (2002) CrossRef
Sigeneger, F., Winkler, R., Contrib. Plasma Phys. 36, 551 (1996) CrossRef
Sigeneger, F., Winkler, R., Plasma Chem. Plasma Process. 17, 1 (1997) CrossRef
Sigeneger, F., Golubovskii, Y.B., Porokhova, I.A., Winkler, R., Plasma Chem. Plasma Process. 18, 153 (1998) CrossRef
Leyh, H., Loffhagen, D., Winkler, R., Comput. Phys. Commun. 113, 33 (1998) CrossRef
Loffhagen, D., Winkler, R., J. Phys. D: Appl. Phys. 29, 618 (1996) CrossRef
Petrov, G., Winkler, R., J. Phys. D: Appl. Phys. 30, 53 (1997) CrossRef
S. Pfau, R. Kozakov, M. Otte, J. Rohmann, Proc. of XXIVth Int. Conf. on Phenomena in Ionized Gases, Warsaw, 1999, Vol. 3, p. 33
Otte, M., Pfau, S., Sigeneger, F., Winkler, R., Europhys. Conf. Abstracts 24F, 272 (2000)
Wilhelm, J., Winkler, R., Beitr. Plasmaphys. 8, 167 (1968) CrossRef
Johnston, T.W., J. Math. Phys. 7, 1453 (1966) CrossRef
Castellvi, P., Comput. Phys. 9, 335 (1995) CrossRef
Sigeneger, F., Sukhinin, G.I., Winkler, R., Plasma Chem. Plasma Process. 20, 87 (2000) CrossRef
Loffhagen, D., Braglia, G.L., Winkler, R., Contrib. Plasma Phys. 38, 527 (1998) CrossRef
Hagstrum, H.D., Phys. Rev. 104, 672 (1956) CrossRef
Winkler, R., Braglia, G.L., Wilhelm, J., Il Nuovo Cimento 10D, 1209 (1988) CrossRef
Fon, W.C., Berrington, K.A., Hibbert, A., J. Phys. B: At. Mol. Opt. Phys. 14, 307 (1981) CrossRef
M. Hayashi, Electron collision cross sections, in Plasma Material Science Handbook, edited by Japan Society for the Promotion of Science (Tokyo, Ohmsha, 1992), p. 748
H. Cohen, Mathematics for Scientists and Engineers (Englewood Cliffs, Prentice-Hall, 1992)