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Swift heavy ion-induced silicon dioxide nanostructuration: experimental observation of velocity effect

Published online by Cambridge University Press:  05 November 2012

A.D. Touboul ,
A. Privat ,
R. Arinero ,
F. Wrobel ,
E. Lorfèvre  and
F. Saigné
A.D. Touboul*
Affiliation:
Université Montpellier 2, IES, UMR5214, F-34095 Montpellier Cedex 5, France
A. Privat
Affiliation:
Université Montpellier 2, IES, UMR5214, F-34095 Montpellier Cedex 5, France
R. Arinero
Affiliation:
Université Montpellier 2, IES, UMR5214, F-34095 Montpellier Cedex 5, France
F. Wrobel
Affiliation:
Université Montpellier 2, IES, UMR5214, F-34095 Montpellier Cedex 5, France
E. Lorfèvre
Affiliation:
CNES, 31410 Toulouse, France
F. Saigné
Affiliation:
Université Montpellier 2, IES, UMR5214, F-34095 Montpellier Cedex 5, France
*
ae-mail: antoine.touboul@univ-montp2.fr
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Abstract

Thanks to atomic force microscope observation of swift heavy ion-induced structural modifications of SiO2-Si layer, we show that for a given linear energy transfer value the radial atomic modification along the ion track depends on the ion velocity regime.

Type
Research Article
Information
The European Physical Journal - Applied Physics , Volume 60 , Issue 1 , October 2012 , 10402
Copyright
© EDP Sciences, 2012

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