A new Monte Carlo program, Win X-ray, is presented that
predicts X-ray spectra measured with an energy dispersive spectrometer
(EDS) attached to a scanning electron microscope (SEM) operating between
10 and 40 keV. All the underlying equations of the Monte Carlo simulation
model are included. By simulating X-ray spectra, it is possible to
establish the optimum conditions to perform a specific analysis as well as
establish detection limits or explore possible peak overlaps. Examples of
simulations are also presented to demonstrate the utility of this new
program. Although this article concentrates on the simulation of spectra
obtained from what are considered conventional thick samples routinely
explored by conventional microanalysis techniques, its real power will be
in future refinements to address the analysis of sample classifications
that include rough surfaces, fine structures, thin films, and inclined
surfaces because many of these can be best characterized by Monte Carlo
methods. The first step, however, is to develop, refine, and validate a
viable Monte Carlo program for simulating spectra from conventional
samples.