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Automated Analysis of Data Mark Microstructure of Optical Discs

Published online by Cambridge University Press:  02 July 2020

D. A. Chernoff ,
C. S. Cook  and
D. L. Burkhead
D. A. Chernoff
Affiliation:
Advanced Surface Microscopy, Inc., 6009 Knyghton Rd., Indianapolis, IN46220. email: info@asmicro.com
C. S. Cook
Affiliation:
Advanced Surface Microscopy, Inc., 6009 Knyghton Rd., Indianapolis, IN46220. email: info@asmicro.com
D. L. Burkhead
Affiliation:
Advanced Surface Microscopy, Inc., 6009 Knyghton Rd., Indianapolis, IN46220. email: info@asmicro.com
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Extract

Introduction. By volume of material produced, optical disc manufacturing is the world's large nanotechnology industry, far surpassing semiconductors and magnetic disks. The development of various optical disc media has introduced a variety of challenges, which necessitate viewing the geometrical structure of the bumps, pits, or grooves on the surface of the discs. The Atomic Force Microscope (AFM) has the resolution and sensitivity needed for device analysis, but in the past has been limited by magnification errors, image distortion, data handling, and calibration. Furthermore, the common measurement procedure for AFM images consists of manual dimensional measurements. This introduces error and limits the number of measurements taken at one time. We have developed an automated process, which overcomes these limitations and provides a comprehensive approach to feature measurement, data analysis, calibration, and reporting.

Type
Scanned Probe Microscopy
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 724 - 725
Copyright
Copyright © Microscopy Society of America

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References

References:

1.Chernoff, D.A. and Burkhead, D. L. , J. Vac. Sci. Technol. A 17, p. 1460. (1999)CrossRefGoogle Scholar
2.Verhaart, G.J., “A strategy for jitter reduction in CD by designed experiments”, Replitech International June, 1997 Speaker Presentations, p. 383.Google Scholar
3.Pohlmann, K.C., The Compact Disc Handbook, 2nd ed. (A-R Editions, Madison, WI, 1992), p. 249.Google Scholar
4.Butty, Jerome, et al., “Methods for characterization of phase change optical discs”, SPIE Conference 3806, “Recent Advances in Metrology, Characterization, and Standards for Optical Digital data Disks, 1999, p. 76.CrossRefGoogle Scholar
5. We thank Michael Serry and Debra Cook of Veeco Metrology for helpful discussions about this technique and application.Google Scholar
6. Images copyright Advanced Surface Microscopy, Inc. Reproduced by permission.Google Scholar