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Determination of Z-Profiles of Diffraction Data from τ-Profiles Using a Numerical Linear Inversion Method

Published online by Cambridge University Press:  06 March 2019

Xiaojing Zhu ,
Benjamin Ballard  and
Paul Predecki
Xiaojing Zhu
Affiliation:
Department of Engineering, University of Denver Denver, CO 80208, USA
Benjamin Ballard
Affiliation:
Department of Engineering, University of Denver Denver, CO 80208, USA
Paul Predecki
Affiliation:
Department of Engineering, University of Denver Denver, CO 80208, USA
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Abstract

A numerical procedure known as the constrained linear inversion method is employed for obtaining the z-profiles of diffraction data from their τ-profiles. The method was first tested with known z-profiles and gave good agreement with the starting z-profiles even with up to 5% random noise introduced into the τ-profile or up to 10% error in specimen thickness. The procedure was then applied to an experimentally obtained strain profile and a non-oscillatory z-profile was calculated. Although the z-profile obtained could not be verified by an independent method, the success of tests with known z-profiles leads to increased confidence in the numerical method described.

Type
III. Applications of Diffraction to Semiconductors and Films
Information
Advances in X-Ray Analysis , Volume 38: Forty-third Annual Conference on Applications of X-ray Analysis , 1994 , pp. 255 - 262
Copyright
Copyright © International Centre for Diffraction Data 1994

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