Hostname: page-component-586b7cd67f-t8hqh Total loading time: 0 Render date: 2024-11-23T19:13:05.610Z Has data issue: false hasContentIssue false
  • English
  • Français

Laser-Produced Plasmas as an Alternative X-Ray Source for Synchrotron Radiation Research and for Microradiography

Published online by Cambridge University Press:  06 March 2019

P. J. Mallozzi ,
H. M. Epstein  and
R. E. Schwerzel
P. J. Mallozzi
Affiliation:
Battelle Memorial Institute 505 King Avenue, Columbus, Ohio 43201
H. M. Epstein
Affiliation:
Battelle Memorial Institute 505 King Avenue, Columbus, Ohio 43201
R. E. Schwerzel
Affiliation:
Battelle Memorial Institute 505 King Avenue, Columbus, Ohio 43201
Get access

Abstract

The radiation from plasmas produced by the interaction of a pulsed laser and a solid target can be made to fall in the soft x-ray regime. The x-rays can serve as an alternative to the increasingly important synchrotron radiation facilities for a variety of techniques such as Extended X-ray Absorption Fine-Structure Spectroscopy and X-ray Lithography. In addition, the x-rays are of special interest for general microradiography of thin samples.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 22: Twenty-Seventh Annual Conference on Applications of X-ray Analysis, August 1-4, 1978 , 1978 , pp. 267 - 279
Copyright
Copyright © International Centre for Diffraction Data 1978

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Hodgson, K. O., Winick, H., and Chu, G., Eds. “Synchrotron Radiation Research”, SSRP 76/100, Stanford University (1976).Google Scholar
2. Smith, H. I., and Flanders, D. C., Japanese J. Appl, Phys. 16, Suppl. 16-1, 61–65 (1977).Google Scholar
3. Stewart, Austin, “Alignment of X-ray Lithography Masks Using a New Interferometric Technique-Experimental Results”, to be published in the Journal of Vacuum Science and Technology as part of the proceedings of the 14th Symposium on Electron Ion and Photon Beam Technology.Google Scholar
4. Mallozzi, P. J., Epstein, H. M., Jung, R. G., Applebaum, D. C., Fairand, B. P., and Gallagher, W. J., J. Appl. Phys. 45, 1891 (1975).Google Scholar
5. Hamman, D. J., Applebaum, D. C., Ullrich, O. A., and Mallozzi, P. J., “Pulsed X-ray Lithography for High-Density Integrated Circuits”, Battelle Columbus Laboratories Report (1977).Google Scholar
6. Mallozzi, P. J., and Epstein, H. M., “Diagnostic Techniques in Laser Fusion Research”, R&D, 27:2-30-42 (1976).Google Scholar
7. Mallozzi, P. J., Epstein, H. M.. Jung, R. G., Applebaum, D. C., Fairand, B. P., Gallagher, W. J., Decker, R. L., and Muckerheide, M. C., “Laser-Generated Plasma as a Source of X-Rays For Medical Applications”, J. Appl. Phys. 45:4. 1891 (1974).Google Scholar
8. Mallozzi, P. J., Epstein, H. M., Jung, R. G., Applebaum, D. C., Fairand, B. P., and Gallagher, W. J., “X-Ray Emission from LaserGenerated Plasmas”, in Fundamental and Applied Laser Physics: Proceedings of the Esfahan Symposium (edit, by Feld, M. S., Javan, A., and Kurnit, N. A.) John Wiley and Sons, New York (1973).Google Scholar
9. Benjamin, R. F., Lyon, P. B., and Day, R. H., LA-UR-76-1502 (1976).Google Scholar
10. Ter-Pogassian, M. M., The Physical Aspects of Diagnostic Radiology, Harper and Raw, New York, 195 (1967).Google Scholar
11. Cosslett, V. E., and Nixon, W. C., X-Ray Microscopy. Cambridge University Press, 19 (1960).Google Scholar