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New Tools for Grazing Incidence Diffraction Measurements: Comparison of Different Primary and Secondary Beam Conditioners

Published online by Cambridge University Press:  06 March 2019

Rainer Stabenow  and
Alfried Haase
Rainer Stabenow
Affiliation:
Rich. Seifert & Co., P.O. Box 1280 D-22902 Ahrensburg, Germany
Alfried Haase
Affiliation:
Rich. Seifert & Co., P.O. Box 1280 D-22902 Ahrensburg, Germany
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Abstract

Grazing incidence diffraction (GID) is a powerful tool for the structural characterization of thin films. Unlike traditional Bragg-Brentano geometry (divergent X-ray beam, focusing geometry), GID experiments are enhanced by a parallel beam of high intensity. Classical conditioning of the X-ray beam is done by using small slits on the primary beam side and a long Soller slit in combination with a flat crystal (e.g. graphite, lithium fluoride or germanium) or an energy dispersive detector on the secondary beam side. However, new alternatives for beam conditioners are becoming available which promise increased performance. X-ray beam optics using either planar or graded parabolically curved multilayer mirrors of high reflectivity have been constructed for the primary beam side as well as for the secondary beam side.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 39: Forty-Fourth Annual Conference on Applications of X-ray Analysis, July 31 - August 4, 1995 , 1995 , pp. 87 - 94
Copyright
Copyright © International Centre for Diffraction Data 1995

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References

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