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The X-Ray Spectrographic Analysis of Thin Films by the Milliprobe Technique

Published online by Cambridge University Press:  06 March 2019

Robert D. Sloan*
Affiliation:
Sloan Research Industries, Inc. Santa Barbara, California
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Abstract

Frequently it is desirable to perform an X-ray spectrographic analysis on an area of a specimen which is considerably smaller than that normally irradiated in bulk-production spectrographs. Ideally, one would turn to an electron-beam microanalyzer for this type of analysis. Unfortunately, there are few of us who can justify the expenditure necessary to equip our laboratories with this instrument. Therefore, a compromise measure has been arrived at which permits the analyst to examine an area many magnitudes smaller than that obtainable from production spectrographs and many magnitudes less expensive than that encountered in electron-probe microanalyzer instrumentation.

Type
Research Article
Copyright
Copyright © International Centre for Diffraction Data 1961

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