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X-ray Topography of Surface Layers and Epitaxial Films

Published online by Cambridge University Press:  06 March 2019

D. Keith Bowen
D. Keith Bowen*
Affiliation:
Department of Engineering, University of Warwick, Coventry CV4 7AL, UK
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Abstract

The techniques of X-ray topography are reviewed, with special reference to their application to the study of surface layers and thin films. The methods of section topography, white radiation topography and double and triple crystal topography are shown to be the most appropriate, with grazing or glancing incidence methods assuming special importance. Applications to the questions of epilayer mismatch and dislocation content, process-induced defects and surface damage are discussed.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 33: Thirty-Eighth Annual Conference on Applications of X-ray Analysis, July 31 - August 4, 1989 , 1989 , pp. 13 - 23
Copyright
Copyright © International Centre for Diffraction Data 1989

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