Hostname: page-component-78c5997874-fbnjt Total loading time: 0 Render date: 2024-11-18T11:22:23.007Z Has data issue: false hasContentIssue false

Grazing Incidence X-Ray Fluorescence Analysis using Synchrotron Radiation

Published online by Cambridge University Press:  06 March 2019

Atsuo Iida*
Affiliation:
Photon Factory National Laboratory for High Energy Physics O-ho, Tsukuba-shi, Ibaraki, 305 Japan
Get access

Abstract

The X-ray fluorescence analysis of a trace element under a grazing incidence condition has been developed using synchrotron radiation. The interference effect plays an important role for determining the depth distribution of the elemental concentration. The elemental distribution above, on or below the material surface has been studied. The glancing angle dependence of the X-ray fluorescence signal around the critical angle strongly reflects the elemental distribution, and can be used to determine the position of the element of interest.

Type
XI. Thin-Film and Surface Characterization by XRS and XPS
Copyright
Copyright © International Centre for Diffraction Data 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1) Huang, T. C. and Parrish, W., Adv. in X-ray Anal., 22: 43 (1979)Google Scholar
2) Laguitton, D. and Parrish, W., Anal. Chem., 49: 1152 (1977)10.1021/ac50016a023Google Scholar
3) Robinson, I. K., in “Handbook on Synchrotron Radiation”, D.Moncton and G.S.Brown, eds. (North-Holland, Amsterdam, 1991)Google Scholar
4) Greaves, G. N., Adv. in X-Ray Analysis, 34: 13 (1991)10.1154/S0376030800014294Google Scholar
5) Kiessig, H., Ann. Phys., 5: 715 (1931)10.1002/andp.19314020607Google Scholar
6) Boher, P., Houdy, P. and Schiller, C.: J. Appl. Phys., 68: 6133 (1990)10.1063/1.346901Google Scholar
7) Lengeler, B., these proceedingsGoogle Scholar
8) Bedzyk, M. J., Nucl. Instruin, and Methods, A266: 679 (1988)10.1016/0168-9002(88)90464-0Google Scholar
9) Wobrauschek, P., Kregsamer, P., Streli, C. and Aiginger, H., Adv. In X-Ray Anal., 34: 1 (1991)Google Scholar
10) Nishihagt, K., Yamashita, N., Fujino, N., Taniguchi, K. and Ikeda, S., Adv. in X-Ray Anal., 34: 81 (1991)Google Scholar
11) Bloch, J. M., Sansone, M., Rondelez, F., Peifer, D. G., Pincus, P., Kim, M. W. and Eisenberger, P. M., Phys. Rev. Lett., 54: 1039 (1985)10.1103/PhysRevLett.54.1039Google Scholar
12) Yun, W. B. abd Bloch, J. M., J. Appl. Phys., 68: 1421 (1990)10.1063/1.346668Google Scholar
13) Brunnel, M., Acta Cryst. A42: 304 (1986)10.1107/S0108767386099208Google Scholar
14) Iida, A., Adv. in X-ray Anal., 34: 23 (1991)Google Scholar
15) Hda, A. and Gohshi, Y., in “Handbook on synchrotron radiation”, vol.4, p307 (North-Holland, Amsterdam, 1991).Google Scholar
16) Parratt, L. G., Phys. Rev., 95: 359 (1954)10.1103/PhysRev.95.359Google Scholar
17) Krol, A., Sher, C. and Kao, Y. H., Phys. Rev. B38: 8579 (1988)10.1103/PhysRevB.38.8579Google Scholar
18) de Boer, D.K.G., Phys. Rev., 844: 498 (1991)10.1103/PhysRevB.44.498Google Scholar
19) Iida, A., Yoshinaga, A., Sakurai, K. and Gohshi, Y., Anal. Chem., 58: 394 (1986)10.1021/ac00293a029Google Scholar
20) Bedzyk, M. J., Bilderback, D. H., Bommarito, G. M., Caffrey, M. and Schildkraut, J. S., Science 241: 1788 (1988)10.1126/science.3175619Google Scholar
21) Bedzyk, M. J., Bommarito, G. M. and Schildkraut, J. S., Phys. Rev. Lett., 62: 1376 (1989)10.1103/PhysRevLett.62.1376Google Scholar
22) Bedzyk, M. J., Bommarito, G. M., Caffrey, M. and Penner, T. L., Science 248: 52 (1990)10.1126/science.2321026Google Scholar
23) Sakurai, K. and Iida, A., These proceedingsGoogle Scholar
24) Barbee, T. W., Jr. and Warburton, W. K., Materials Letters, 17 (1984)Google Scholar
25) Iida, A., Matsushita, T. and Ishikawa, T., Jpn. J. Appl. Phys., 24:L675 (1985)10.1143/JJAP.24.L675Google Scholar
26) Matsushita, T., Iida, A., Ishikawa, T., Nakagiri, T. and Sakai, K., Nucl. Instr, and Methods A246:751(1986)10.1016/0168-9002(86)90184-1Google Scholar
27) Abmna, H. D., Bommarito, G. M., Acevedo, D., Science, 250: 69 (1990)Google Scholar
28) Sakurai, K. and Iida, A., Adv. in X-Ray Anal., vol.33, p 205 Google Scholar