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Layer Thickness Determination of Thin Films by Grazing Incidence X-Ray Experiments using Interference Effect

Published online by Cambridge University Press:  06 March 2019

Kenji Sakurai  and
Atsuo Iida
Kenji Sakurai
Affiliation:
National Research Institute for Metals: 1-2-1 Sengen, Tsukuba Ibaraki 305, Japan
Atsuo Iida
Affiliation:
Photon Factory, National Laboratory for High Energy Physics 1-1 Oho, Tsukuba, Ibaraki 305, Japan
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Abstract

A novel method using Fourier transform algorithm is proposed to determine each layer thickness of multi-layered thin films from interference oscillation observed in X-ray specular reflection. The peak position in Fourier space gives each layer thickness of the film. The principle of the present technique as well as its applications are described.

Type
XI. Thin-Film and Surface Characterization by XRS and XPS
Information
Advances in X-Ray Analysis , Volume 35 , Issue B: First Pacific-International Congress on X-ray Analytical Methods (PICXAM). Fortieth Annual Conference on Applications of X-ray Analysis, August 7-16, 1991 , 1991 , pp. 813 - 818
Copyright
Copyright © International Centre for Diffraction Data 1991

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