Hostname: page-component-78c5997874-ndw9j Total loading time: 0 Render date: 2024-11-17T23:17:27.571Z Has data issue: false hasContentIssue false
  • English
  • Français

A correction to the nanoindentation technique for ultrashallow indenting depths

Published online by Cambridge University Press:  31 January 2011

Chang-Dong Yeo  and
Andreas A. Polycarpou
Chang-Dong Yeo
Affiliation:
Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801
Andreas A. Polycarpou*
Affiliation:
Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801
*
a)Address all correspondence to this author.e-mail: polycarp@uiuc.edu
Get access

Abstract

A correction to the nanoindentation technique taking into account the elastic recovery at extremely shallow contact depths was proposed. Using a high-sensitivity nanoindentation system with a sharp indenting tip, the magnitude of the elastic recovery could be obtained directly from very low-force load–unload curves, which was then used to correct the contact area used for hardness measurements. Nanoindentation experiments were performed on a standard fused quartz sample and, compared to standard nanoindentation techniques, the proposed method was found to be more accurate at ultrashallow indenting depths of <3 nm.

Keywords

Elastic propertiesHardnessNanoscale
Type
Rapid Commnunications
Information
Journal of Materials Research , Volume 22 , Issue 9 , September 2007 , pp. 2359 - 2362
Copyright
Copyright © Materials Research Society 2007

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Buckle, H.: The Science of Hardness Testing and Its Research Applications American Society for Metals Metals Park, OH 1973 453Google Scholar
2Lichinchi, M., Lenardi, C., Haugt, J.Vitali, K.: Simulation of Berkovich nanoindentation experiments on thin films using finite element method. Thin Solid Films 312, 240 1998Google Scholar
3Xu, Z.Rowcliffe, D.: Nanoindentation on diamond-like carbon and alumina coatings. Surf. Coat. Technol. 161, 44 2002Google Scholar
4Yeo, C-D., Polycarpou, A.A., Kiely, J.D.Hsia, Y-T.: Nanomechanical properties of sub-10 nm carbon film overcoats using the nanoindentation technique. J. Mater. Res. 22, 141 2007Google Scholar
5Oliver, W.C.Pharr, G.M.: An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J. Mater. Res. 7, 1564 1992CrossRefGoogle Scholar
6Kohzaki, M., Matsumuro, A., Hayashi, T., Muramatsu, M.Yamaguchi, K.: Preparation of carbon nitride thin films by ion-beam-assisted deposition and their mechanical properties. Thin Solid Films 308–309, 239 1997CrossRefGoogle Scholar
7Scharf, T.W., Deng, H.Barnard, J.A.: Nanowear/nanomechanical testing and the role of stress in sputtered CNx overcoats. J. Appl. Phys. 81(8), 5393 1997Google Scholar
8Sneddon, I.N.: The relation between load and penetration in the axisymmetric Boussinesq problem for a punch of arbitrary profile. Int. J. Eng. Sci. 3, 47 1965CrossRefGoogle Scholar
9Lemoine, P., Zhao, J.F., Quinn, J.P., McLaughlin, J.A.Maguire, P.: Hardness measurements at shallow depths on ultra-thin amorphous carbon films deposited onto silicon and Al2O3-TiC substrates. Thin Solid Films 379, 166 2000Google Scholar
10Stilwell, N.A.Tabor, D. Elastic recovery of conical indentation. Phys. Proc. Soc., 78, 169 (1961)Google Scholar
11Cheng, Y.Cheng, C.: Relationships between hardness, elastic modulus, and the work of indentation. Appl. Phys. Lett. 73(5), 614 1998Google Scholar
12Cheng, Y.Cheng, C.: Scaling approach to conical indentation in elastic-plastic solids with work hardening. J. Appl. Phys. 84, 1284 1998Google Scholar
13Tuck, J.R., Korsunsky, A.M., Bull, S.J.Davison, R.I.: On the application of the work-of-indentation approach to depth-sensing indentation experiments in coated systems. Surf. Coat. Technol. 137, 217 2001CrossRefGoogle Scholar
14Giannakopoulos, A.E.Suresh, S.: Determination of elastoplastic properties by instrumented sharp indentation. Scripta Mater. 40(10), 1191 1999CrossRefGoogle Scholar
15Yu, N., Bonin, W.A.Polycarpou, A.A.: High-resolution capacitive load-displacement transducer and its application in nanoindentation and adhesion force measurements. Rev. Sci. Instrum. 76, 045109 2005Google Scholar
16Yu, N.Polycarpou, A.A.: Use of the focused ion beam technique to produce a sharp spherical diamond indenter for sub-10 nm nanoindentation measurements. J. Vac. Sci. Technol., B 22, 668 2004CrossRefGoogle Scholar