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Dense and smooth epitaxial BaTiO3 thin films by the dipping-pyrolysis process

Published online by Cambridge University Press:  31 January 2011

S. Kim ,
T. Fujimoto ,
T. Manabe ,
I. Yamaguchi ,
T. Kumagai  and
S. Mizuta
S. Kim
Affiliation:
National Institute of Materials and Chemical Research, Tsukuba, Ibaraki 305, Japan and Department of Chemical Engineering, Yosu National University, Yosu 550-250, Korea
T. Fujimoto
Affiliation:
National Institute of Materials and Chemical Research, Tsukuba, Ibaraki 305, Japan
T. Manabe
Affiliation:
National Institute of Materials and Chemical Research, Tsukuba, Ibaraki 305, Japan
I. Yamaguchi
Affiliation:
National Institute of Materials and Chemical Research, Tsukuba, Ibaraki 305, Japan
T. Kumagai
Affiliation:
National Institute of Materials and Chemical Research, Tsukuba, Ibaraki 305, Japan
S. Mizuta
Affiliation:
National Institute of Materials and Chemical Research, Tsukuba, Ibaraki 305, Japan
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Abstract

Dense and smooth BaTiO3 thin films were prepared on SrTiO3 (100) substrates by the dipping-pyrolysis process using a mixed precursor solution of barium and titanium naphthenates. Combination effects of prefiring [at 150–450 °C in air or low oxygen partial pressure, p(O2)[ and final heat treatment [at 850 °C in air or low p(O2)[ on preparation of BaTiO3 thin films were examined. An epitaxial BaTiO3 thin film with a dense and smooth surface consisting of nanosized grains about 70 nm was prepared by prefiring under low p(O2) at 250 °C and final heat treatment under low p (O2) at 850 °C.

Type
Articles
Information
Journal of Materials Research , Volume 14 , Issue 2 , February 1999 , pp. 592 - 596
Copyright
Copyright © Materials Research Society 1999

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References

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