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Direct inkjet printing of composite thin barium strontium titanate films

Published online by Cambridge University Press:  31 January 2011

T. Kaydanova ,
A. Miedaner ,
C. Curtis ,
J. Alleman ,
J.D. Perkins ,
D.S. Ginley ,
L. Sengupta ,
X. Zhang ,
S. He  and
L. Chiu
...Show all authors
T. Kaydanova
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
A. Miedaner
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
C. Curtis
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
J. Alleman
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
J.D. Perkins
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
D.S. Ginley
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
L. Sengupta
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
X. Zhang
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
S. He
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
L. Chiu
Affiliation:
National Renewable Energy Laboratory, Golden, Colorado 80401
L. Sengupta
Affiliation:
Paratek Microwave, Columbia, Maryland 21045
X. Zhang
Affiliation:
Paratek Microwave, Columbia, Maryland 21045
S. He
Affiliation:
Paratek Microwave, Columbia, Maryland 21045
L. Chiu
Affiliation:
Paratek Microwave, Columbia, Maryland 21045
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Abstract

Composite Ba0.6Sr0.4TiO3/MgO thin films with 60% tuning and tan [H9254] of 0.007 at 2 GHz were deposited using metal organic decomposition inks by spin coating on single crystal MgO substrates. The films with approximately 1 mol% MgO in Ba0.6Sr0.4TiO3 had a better tuning/loss ratio than either the 0 or the 10 mol% MgO substituted films. Crystalline Ba0.5Sr0.5TiO3 films were produced on both MgO and alumina substrates by inkjet printing of metalorganic precursors with subsequent thermal decomposition followed by annealing at 900°C. Barium strontium titanate lines as narrow as 100 μm were printed on the alumina substrates. The inkjet-printed films were predominantly (100) oriented on MgO and (110) oriented on alumina. The crystalline quality of the inkjet-printed films was improved by annealing at 1100°C for 3 h in oxygen. Both the printed and the spin-coated films had smooth surfaces (300 Å root-mean-square roughness) as required for subsequent deposition of high-resolution metal electrodes. An inkjet-printed Ba0.5Sr0.5TiO3 film (3500 Å) on MgO annealed at 1100°C had 20% tunability of the dielectric constant (ε) at 9.1 V/μm direct current bias and tan δ < 0.002 at 1 MHz.

Type
Articles
Information
Journal of Materials Research , Volume 18 , Issue 12 , December 2003 , pp. 2820 - 2825
Copyright
Copyright © Materials Research Society 2003

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