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Improved crystallinity and optical properties of AlOx thin films by a ZnO interlayer

Published online by Cambridge University Press:  06 January 2012

Su-Shia Lin  and
Jow-Lay Huang
Su-Shia Lin
Affiliation:
Department of Material Science and Engineering, National Cheng-Kung University, Tainan, Taiwan 701, Republic of China
Jow-Lay Huang
Affiliation:
Department of Material Science and Engineering, National Cheng-Kung University, Tainan, Taiwan 701, Republic of China
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Abstract

To ascertain how the substrate influences the quality of AlOx films, AlOx films were grown on a bare glass and a ZnO-deposited glass in this study. By applying a ZnO interlayer before the AlOx deposition, AlOx films exhibited polycrystalline structure rather than amorphous as obtained by sputtering on a bare glass. For AlOx film on the ZnO-deposited glass, the transmission electron microscopy observation showed the coexistence of amorphous and polycrystalline structure, which reveals that the (122) plane in AlOx film is parallel to the surface of the substrate. The grains of the AlOx film grown on a ZnO-deposited glass comprising many small crystallites aggregated with sizes varying between 38 and 54 nm with irregular grain shapes. Besides, the ZnO interlayer with different deposition parameters had a significant effect in the diffusion interface between AlOx and ZnO. The ZnO interlayer could improve the optical transmission of AlOx films, especially when ZnO films are prepared with a high power of 200 W. Therefore, the glass/ZnO may be a good alternative substrate for producing high-quality AlOx films by controlling the epitaxial grain growth. The AlOx films grown on ZnO-deposited glasses have very good qualities in terms of crystallinity and optical properties.

Type
Articles
Information
Journal of Materials Research , Volume 18 , Issue 4 , April 2003 , pp. 965 - 972
Copyright
Copyright © Materials Research Society 2003

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