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Improvement of carbon nanocoil purity achieved by supplying catalyst molecules from the vapor phase in chemical vapor deposition

Published online by Cambridge University Press:  26 September 2014

Yoshiyuki Suda ,
Yuichi Ishii ,
Tatsuki Miki ,
Koji Maruyama ,
Hideto Tanoue ,
Hirofumi Takikawa ,
Hitoshi Ue ,
Kazuki Shimizu  and
Yoshito Umeda
Yoshiyuki Suda*
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan
Yuichi Ishii
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan
Tatsuki Miki
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan
Koji Maruyama
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan
Hideto Tanoue
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan
Hirofumi Takikawa
Affiliation:
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan
Hitoshi Ue
Affiliation:
Fuji Research Laboratory, Tokai Carbon Co., Ltd., Oyama, Shizuoka 410-1431, Japan
Kazuki Shimizu
Affiliation:
Development Department, Shonan Plastic Manufacturing Co., Ltd., Hiratsuka, Kanagawa 254-0807, Japan
Yoshito Umeda
Affiliation:
Toho Gas Co., Ltd., Tokai, Aichi 476-8501, Japan
*
a)Address all correspondence to this author. e-mail: suda@ee.tut.ac.jp
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Abstract

We investigated how changes in the method of supplying Sn and Fe carbon nanocoil (CNC) catalysts affected the results of chemical vapor deposition. The Sn/Fe catalysts were supplied using the following four materials: a thin Sn film, a drop-coated solution of Fe2O3, tetramethyltin (TMT) vapor, and ferrocene vapor. The CNC purity was evaluated using scanning electron microscopy. The CNC purity in the overall carbon deposit was also evaluated by analyzing the cross-section of the deposit. The CNC purity averaged over the overall carbon deposit was increased 1.5-fold by the TMT supply. We obtained a maximum CNC purity of 72% using a combination of TMT and ferrocene vapors, with Sn/Fe deposition on the substrate. Energy-dispersive x-ray spectroscopy analysis of the catalyst nanoparticles in the tips of the CNCs and carbon nanofibers (CNFs) revealed that there was a large difference in the Sn/Fe molar ratios for the angular- and round-type CNFs.

Keywords

catalyticchemical vapor deposition (CVD) (deposition)Sn
Type
Articles
Information
Journal of Materials Research , Volume 29 , Issue 18 , 28 September 2014 , pp. 2179 - 2187
Copyright
Copyright © Materials Research Society 2014 

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References

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