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Micropatterning of Fe-based bulk metallic glass surfaces by pulsed electrochemical micromachining

Published online by Cambridge University Press:  31 October 2012

Ralph Sueptitz*
Affiliation:
Chemistry of Functional Materials, Leibniz Institute for Solid State and Materials Research IFW Dresden, D-01069 Dresden, Germany
Kristina Tschulik
Affiliation:
Chemistry of Functional Materials, Leibniz Institute for Solid State and Materials Research IFW Dresden, D-01069 Dresden, Germany
Christian Becker
Affiliation:
Chemistry of Functional Materials, Leibniz Institute for Solid State and Materials Research IFW Dresden, D-01069 Dresden, Germany
Mihai Stoica
Affiliation:
Chemistry of Functional Materials, Leibniz Institute for Solid State and Materials Research IFW Dresden, D-01069 Dresden, Germany
Margitta Uhlemann
Affiliation:
Chemistry of Functional Materials, Leibniz Institute for Solid State and Materials Research IFW Dresden, D-01069 Dresden, Germany
Jürgen Eckert
Affiliation:
Chemistry of Functional Materials, Leibniz Institute for Solid State and Materials Research IFW Dresden, D-01069 Dresden, Germany
Annett Gebert
Affiliation:
Chemistry of Functional Materials, Leibniz Institute for Solid State and Materials Research IFW Dresden, D-01069 Dresden, Germany
*
a)Address all correspondence to this author. e-mail: r.sueptitz@ifw-dresden.de
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Abstract

A new technique for micropatterning Fe-based bulk metallic glass surfaces is reported. The transpassive dissolution process is utilized for a defined localized material removal when using a pulsed electrochemical micromachining process. By applying submicrosecond pulses between a work piece and a tool electrode, microholes of high aspect ratio and depth of up to 100 μm can be machined into the bulk glassy Fe65.5Cr4Mo4Ga4P12C5B5.5 alloy. Two potential electrolytes are identified for the machining process. For these electrolytes, different reaction mechanisms are discussed. The possibility of machining more complex structures is demonstrated for the most promising electrolyte, a methanolic H2SO4solution. The impact of the process parameters, pulse length and pulse voltage, on the machining gap and the surface quality of the machined structures is evaluated.

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Articles
Copyright
Copyright © Materials Research Society 2012

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References

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