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Pulsed-laser deposition of polytetrafluoroethylene

Published online by Cambridge University Press:  03 March 2011

Wenbiao Jiang ,
M. Grant Norton ,
Lancy Tsung  and
J. Thomas Dickinson
Wenbiao Jiang
Affiliation:
Department of Mechanical and Materials Engineering, Washington State University, Pullman, Washington 99164-2920
M. Grant Norton*
Affiliation:
Department of Mechanical and Materials Engineering, Washington State University, Pullman, Washington 99164-2920
Lancy Tsung
Affiliation:
Philips Electronic Instruments Company, 85 McKee Drive, Mahwah, New Jersey 07430
J. Thomas Dickinson
Affiliation:
Department of Physics, Washington State University, Pullman, Washington 99164-2814
*
a)Author to whom all correspondence should be addressed.
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Abstract

Thin films of polytetrafluoroethylene have been deposited on amorphous substrates by the pulsed-laser deposition technique. By transmission electron microscopy, the polymer films were shown to consist of both amorphous and crystalline components. The data for the crystalline component are consistent with it being highly ordered with the long helical molecular chains aligned parallel to the film substrate interface plane. The fraction of crystalline material in the films was found to be related to the substrate temperature during deposition with the maximum amount of crystalline material occurring when the substrate temperature was close to the melting temperature of the polymer.

Type
Articles
Information
Journal of Materials Research , Volume 10 , Issue 4 , April 1995 , pp. 1038 - 1043
Copyright
Copyright © Materials Research Society 1995

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References

REFERENCES

1Luff, P. P. and White, M., Vacuum 18, 437 (1968).CrossRefGoogle Scholar
2Tibbitt, J. M., Shen, M., and Bell, A. T., Thin Solid Films 29, L43 (1975).Google Scholar
3Kay, E. and Dilks, A., J. Vac. Sci. Technol. 18, 1 (1981).Google Scholar
4Nakano, T., Kasama, Y., Ohki, Y., and Yahagi, K., Jpn. J. Appl. Phys. 24, 83 (1985).CrossRefGoogle Scholar
5Fracassi, F., Occhiello, E., and Coburn, J. W., J. Appl. Phys. 62, 3980 (1987).Google Scholar
6d'Agostino, R., Fracassi, F., and Illuzzi, F., J. Appl. Polym. Sci.: Appl. Poly. Symp. 46, 17 (1990).Google Scholar
7Stuke, M. and Zhang, Y., Proc. Symp. on Laser Processes Microelectronics Application (The Electrochemical Society, Pennington, NJ, 1987), Vol. 88-10, pp. 70–81.Google Scholar
8Goodwin, P. M. and Otis, C. E., J. Appl. Phys. 69, 2584 (1991).CrossRefGoogle Scholar
9Kurosaki, K., J. Appl. Polym. Sci.: Appl. Poly. Symp. 48, 401 (1991).CrossRefGoogle Scholar
10Gardella, J. A. Jr., Hercules, D. M., and Heinen, H. J., Spectrosc. Lett. 13, 347 (1980).Google Scholar
11Dickinson, J. T., Shin, J-J., Jiang, W., and Norton, M. G., J. Appl. Phys. 74, 4729 (1993).CrossRefGoogle Scholar
12Dickinson, J. T., Shin, J-J., Jiang, W., and Norton, M. G., Nucl. Instrum. Methods B 91, 672 (1994).CrossRefGoogle Scholar
13Blanchet, G. B., Fincher, C. R. Jr., Jackson, C. L., Shah, S. I., and Gardner, K. H., Science 262, 719 (1993).CrossRefGoogle Scholar
14Blanchet, G. B. and Shah, S. I., Appl. Phys. Lett. 62, 1026 (1993).CrossRefGoogle Scholar
15Williams, D. H. and Fleming, I., Spectroscopic Methods in Organic Chemistry, 2nd ed. (McGraw-Hill Book Company, London, 1973), p. 65.Google Scholar
16Clark, E. S. and Muus, L. T., Z. Kristallogr. B 117, 119 (1962).Google Scholar
17Dietz, P., Hansma, P. K., Ihn, K. J., Motamedi, F., and Smith, P., J. Mater. Sci. 28, 1372 (1993).Google Scholar
18Yamaguchi, S. and Tsuji, M., J. Mater. Res. 8, 2942 (1993).Google Scholar
19Yamamoto, T., Kanbara, T., and Mori, C., Chem. Lett. 1211 (1990).Google Scholar
20Blanchet, G. B., Appl. Phys. Lett. 62, 479 (1993).Google Scholar
21Cheung, J. T. and Sankur, H., CRC Crit. Rev. Solid State Mater. Sci. 15, 63 (1988).CrossRefGoogle Scholar
22Clark, E. S. and Muus, L. T., Z. Kristallogr. B 117, 108 (1962).Google Scholar