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Study of diamond growth from a variety of input gases

Published online by Cambridge University Press:  03 March 2011

K.L. Menningen ,
C.J. Erickson ,
M.A. Childs ,
L.W. Anderson  and
J.E. Lawler
K.L. Menningen
Affiliation:
Department of Physics, University of Wisconsin-Madison, 1150 University Avenue, Madison, Wisconsin 53706
C.J. Erickson
Affiliation:
Department of Physics, University of Wisconsin-Madison, 1150 University Avenue, Madison, Wisconsin 53706
M.A. Childs
Affiliation:
Department of Physics, University of Wisconsin-Madison, 1150 University Avenue, Madison, Wisconsin 53706
L.W. Anderson
Affiliation:
Department of Physics, University of Wisconsin-Madison, 1150 University Avenue, Madison, Wisconsin 53706
J.E. Lawler
Affiliation:
Department of Physics, University of Wisconsin-Madison, 1150 University Avenue, Madison, Wisconsin 53706
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Abstract

The gas phase densities of CH3 and CH and the hydrogen dissociation fraction are measured in a hot filament diamond deposition system for each of several different hydrocarbon input gases. The crystal growth rate and the appearance of the diamond grown from the different input gases are also examined. A comparison of the measurements indicates that the nature of the input hydrocarbon is relatively unimportant because fast gas phase reactions completely scramble the identities of the input carbon atoms. The addition of oxygen greatly alters the gas phase densities and other experimental factors such as the filament surface condition. Small concentrations of atomic impurities in the gas phase are also detected using high sensitivity absorption spectroscopy.

Type
Articles
Information
Journal of Materials Research , Volume 10 , Issue 5 , May 1995 , pp. 1108 - 1114
Copyright
Copyright © Materials Research Society 1995

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References

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